发明名称 METHOD AND DEVICE FOR MEASURING THE TEMPERATURE OF AN OBJECT AND HEATING METHOD
摘要 Method for measuring the temperature of an object that is heated by means of one or more radiation sources, wherein radiation generated by the object is received in at least one radiation pick-up and wherein the radiation sources are changed at least partially in intensity at a predetermined cyclic rate of change and wherein on the basis of the change in the radiation value measured by the radiation pick-up the degree of compensation for the reflectivity and/or emissivity of the object is determined.
申请公布号 WO9212405(A1) 申请公布日期 1992.07.23
申请号 WO1992EP00039 申请日期 1992.01.08
申请人 INTERUNIVERSITAIR MICRO ELEKTRONICA CENTRUM VZW 发明人 VANDENABEELE, PETER, MICHAEL, NOEL
分类号 G01J5/00;H01L21/26 主分类号 G01J5/00
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