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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH04202766(A)
申请公布日期
1992.07.23
申请号
JP19900337647
申请日期
1990.11.30
申请人
RICOH CO LTD
发明人
KINOSHITA MIKIO;OTA WASABURO;SATO TATSUYA
分类号
C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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