A SILICON VALVE ASSEMBLY FOR CONTROLLING THE FLOW OF FLUID

摘要

A valve assembly for controlling fluid flow includes a valve plate (80) and a nozzle plate (50) which are not attached to each other but can be moved into and out off contract with each other. The valve plate has an opening (83) for passing an actuator (10) and fluid. A nozzle plate (50) has an opening (51) for passing fluid and the opening is aligned with a mesa (84) on the valve plate (80) which can seal the nozzle orifice. The actuator (101) separates the nozzle plate (50) from the valve plate (80) to permit fluid flow and a spring means (100) brings the nozzle plate (50) into a closed position against the valve plate (80) to stop fluid flow.