Semiconductor gyro apparatus.

摘要

The present invention is concerned with a gyro apparatus making use of a semiconductor wherein the Coriolis force acting on the electron flow within the solid-state semiconductor device (31) is detected as a differential current for detecting the angular velocity. At least one current supply section (32) and at least two current detection sections (33, 34) spaced apart from the current supply section and from each other are provided in the semiconductor device for detecting the deviation of the current produced on application of an angular velocity as a differential current.