DRY INTERFACE THERMAL CHUCK TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR WAFER TESTING
摘要
申请公布号
EP0438957(A3)
申请公布日期
1992.07.22
申请号
EP19900480211
申请日期
1990.12.12
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
ABRAMI, ANTHONY JOHN;BULLARD, STUART HOWARD;DEL PUERTO, SANTIAGO ERNESTO;GASCHKE, PAUL MATTHEW;LAFORCE, MARK RAYMOND;ROGGEMANN, PAUL JOSEPH;LONGENBACH, KORT FOSTER
