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发明名称
UNIT FOR VACUUM GENERATION
摘要
申请公布号
JPH04201085(A)
申请公布日期
1992.07.22
申请号
JP19900331963
申请日期
1990.11.29
申请人
SMC CORP
发明人
NAGAI SHIGEKAZU;MATSUSHIMA HIROSHI;SAITO AKIO
分类号
B25J15/06;F04F5/20;F04F5/44;F15B11/00
主分类号
B25J15/06
代理机构
代理人
主权项
地址
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