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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
US5132758(A)
申请公布日期
1992.07.21
申请号
US19890308777
申请日期
1989.02.09
申请人
HITACHI, LTD.
发明人
MINAMI, MASATAKA;WAKUI, YOUKOU;NAGANO, TAKAHIRO
分类号
H01L21/28;H01L21/336;H01L29/423;H01L29/43;H01L29/49;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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