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发明名称
DRY ETCHING EQUIPMENT
摘要
申请公布号
JPH04199821(A)
申请公布日期
1992.07.21
申请号
JP19900335775
申请日期
1990.11.29
申请人
NITSUSHIN HAITETSUKU KK
发明人
URANO SHINICHI;OKAZAKI NAOTO;OGINO SEIICHI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
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