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发明名称
COATING APPARATUS
摘要
申请公布号
JPH04200768(A)
申请公布日期
1992.07.21
申请号
JP19900335667
申请日期
1990.11.30
申请人
TOKYO ELECTRON LTD;TOUKIYOU EREKUTORON KIYUUSHIYUU KK
发明人
MORIOKA NORIMITSU;TAGAMI KOICHI
分类号
B05C5/00;B05C11/10;H01L21/00;H01L21/027;H01L21/30
主分类号
B05C5/00
代理机构
代理人
主权项
地址
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