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经营范围
发明名称
SEMICONDUCTOR FABRICATION DEVICE
摘要
申请公布号
JPH04199537(A)
申请公布日期
1992.07.20
申请号
JP19900335367
申请日期
1990.11.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
TOKUDA MASAHARU
分类号
G03F7/16;B05C5/00;B05C11/08;B05C11/10;H01L21/027;H01L21/66
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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