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经营范围
发明名称
CONTACT HOLE FILLING METHOD
摘要
申请公布号
JPH04199618(A)
申请公布日期
1992.07.20
申请号
JP19900325834
申请日期
1990.11.29
申请人
MIYAZAKI OKI ELECTRIC CO LTD;OKI ELECTRIC IND CO LTD
发明人
TSUKURA TAKASHI
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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