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发明名称
FLOW QUANTITY DETECTING DEVICE
摘要
申请公布号
JPH04198717(A)
申请公布日期
1992.07.20
申请号
JP19900328415
申请日期
1990.11.28
申请人
TOKYO ELECTRON LTD;TOUKIYOU EREKUTORON KIYUUSHIYUU KK
发明人
MATSUYAMA YUJI;MURAKAMI KOICHI
分类号
G01F1/24;G01F1/22
主分类号
G01F1/24
代理机构
代理人
主权项
地址
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