| 摘要 |
<p>PURPOSE:To obtain a photosensitive compsn. capable of forming a positive image, not causing the lowering of resolving power due to swelling and requiring no consideration to the problem of Cr<6+> by using a specified polymer or a compsn. contg. the polymer and a specified naphthoquinonediazido compd. CONSTITUTION:A photosensitive compsn. is formed with a polymer contg. repeating units represented by formulae I-III or a compsn. contg. the polymer and a naphthoquinonediazido compd. represented by formula IV. In the polymer, the number of the repeating units represented by the formula II is larger than that of the repeating units represented by the formula I. In the formulae I-IV, each of R<1>-R<3> is H or CH3, R<4> is a functional group having an epoxy ring, R<5> is an aliphatic or arom. group and x is an integer of >=1. When the photosensitive compsn. is irradiated with light, the irradiated part is made soluble and a positive image can be formed. Since the compsn. is not swollen at the time of development, a fine pattern can be formed and the resulting film can be allowed to assume a desired color by coloring with an acid dye and can be made insoluble in solvents by modification.</p> |
