| 摘要 |
<p>PURPOSE:To prevent the quality deterioration of an object to be processed by preventing at least the surface of a carrier placing table from being electrostatically charged. CONSTITUTION:An aluminum base 103 is firmly provided on a pair of columns 101, and an aluminum sub-base 105 is provided at an interval from the base 103. A plastic mounting table 107, which is electrostatical charge proof, is firmly adhered on the sub-base 105. Thus, the influence of static electricity on a wafer in a carrier 7 is eliminated even when the carrier 7 is mounted on a carrier placing table 8 by providing the mounting table 107 made of electrostatical charge proof plastic on the carrier placing table 8.</p> |
