DRY ETCHING EQUIPMENT,申请号JP19900328349-传众专利搜索

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发明名称	DRY ETCHING EQUIPMENT
摘要
申请公布号	JPH04196527(A)	申请公布日期	1992.07.16
申请号	JP19900328349	申请日期	1990.11.28
申请人	NEC CORP	发明人	SATOU FUMIHIDE
分类号	H01L21/302;H01L21/02;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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