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发明名称
SEALING MECHANISM FOR DRIVING EQUIPMENT
摘要
申请公布号
JPH04196532(A)
申请公布日期
1992.07.16
申请号
JP19900331313
申请日期
1990.11.28
申请人
TOKYO ELECTRON LTD;TOUKIYOU EREKUTORON KIYUUSHIYUU KK
发明人
KAMIKAWA YUJI;NISHI MITSUO
分类号
H01L21/677;H01L21/304;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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