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发明名称
CHEMICAL VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH04196221(A)
申请公布日期
1992.07.16
申请号
JP19900326900
申请日期
1990.11.27
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUTAHARA KOUICHIROU;YAMAGUCHI TORU
分类号
H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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