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发明名称
WAFER HOLDING MECHANISM
摘要
申请公布号
JPH04196147(A)
申请公布日期
1992.07.15
申请号
JP19900321964
申请日期
1990.11.26
申请人
JEOL LTD
发明人
SHIBUKI YOICHI
分类号
H01L21/66;H01L21/027
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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