摘要 |
<p>A semiconductor integrated circuit is used to obtain a driving signal for driving a load. The semiconductor integrated circuit includes a compound semiconductor substrate (SUB), a logic part (20) including at least a first field effect transistor (1, 22) formed on the compound semiconductor substrate for outputting a first signal, and a driver part (30) including at least a second field effect transistor (2, 31) formed on the compound semiconductor substrate and outputting the first signal through the second field effect transistor as a driving signal. The first field effect transistor (1, 22) is a self-aligned type field effect transistor having a first gate electrode (G22) and first and second impurity regions (41, 42) formed in self-alignment to the first gate electrode. The second field effect transistor (2, 31) is a non-self-aligned type field effect transistor having a second gate electrode (G31) and third and fourth impurity regions (44, 45) formed in non-self-alignment to the second gate electrode. <IMAGE></p> |