| 摘要 |
<p>PURPOSE:To simulate the facility operations of the whole production line only by starting the programs of the production facilities corresponding to the constitution of the production line by making the production facilities and the programs which simulate the operations correspond to each other one to one. CONSTITUTION:The facilities 4, 5, and 6 are connected to communication channels 13a, 13b, and 13c of an automatic controller 1 by communication channels 42, 52, and 62 and inform the automatic controller 1 of the states of their operation which they perform according to operation commands from the automatic controller 1. The automatic controller 1 operate the facilities automatically according to control algorithm by using the operation states of the facilities. A wafer from a precedent process is stored temporarily in a wafer stocker 4 while put in a wafer cassette. Then the wafer cassette which is stored temporarily is taken out of the wafer stocker 4 by a conveyance robot 5 with a conveyance command from the automatic controller 1 and processed.</p> |
