发明名称 MARCHING INTERCONNECTING LINES IN SEMICONDUCTOR INTEGRATED CIRCUITS
摘要 MARCHING INTERCONNECTING LINES IN SEMICONDUCTOR INTEGRATED CIRCUITS In order to reduce parasitic capacitive cross-coupling in an integrated circuit, metallization lines in an array--for example, an array of word lines, of bit lines, or of bus interconnects-are geometrically arranged in a systematically progressive marching sequence, whereby the identity of the lines located on either side of a given line keeps changing.
申请公布号 CA1305255(C) 申请公布日期 1992.07.14
申请号 CA19870543455 申请日期 1987.07.30
申请人 AMERICAN TELEPHONE AND TELEGRAPH COMPANY 发明人 LEBOWITZ, JOSEPH;LYNCH, WILLIAM T.
分类号 H01L21/82;H01L21/3205;H01L21/8242;H01L23/52;H01L23/522;H01L23/528;H01L27/10;H01L27/108 主分类号 H01L21/82
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