| 摘要 |
PURPOSE:To avoid the effect of the thermal distortion due to the expansion coefficient difference between the pressure converter main body and the sensing diaphragm by arranging in the detecting chamber in the main body the first cantilever beam forming a capacitor plate. CONSTITUTION:A through hole 10 leading to a detecting chamber 2 provided in the main body 1 is provided in a cylindrical metal housing 9 as the detecting portion previously equipped with measuring elements such as capacitors and the like. A tube 11 is forced into said hole as a blank cap. In said tube, a capacitor plate 12 as a movable electrode is placed, and interposing it, capacitor plates 13 and 14 as fixed electrodes are arranged facing to each other at a given interval and secured to the tube 11 by means of glass. Thus, in said capacity type pressure detecting portion, the two fixed electrodes and the movable electrode placed therebetween form a cantilever structure. Thereby, the effect of the distortion due to heat is small, and excellent temperature characteristics can be obtained. |
