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发明名称
METHOD FOR FORMING SEMICONDUCTOR CRYSTAL AND SEMICONDUCTOR CRYSTAL ARTICLE OBTAINED BY SAID METHOD
摘要
申请公布号
US5130103(A)
申请公布日期
1992.07.14
申请号
US19910752922
申请日期
1991.08.30
申请人
CANON KABUSHIKI KAISHA
发明人
YAMAGATA, KENJI;KUMOMI, HIDEYA;TOKUNAGA, HIROYUKI;ARAO, KOZO
分类号
C30B25/02;C30B25/18;H01L21/20;H01L27/142;H01L31/0352;H01L31/18
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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