摘要 |
<p>PURPOSE:To downsize a trace fluid feed pump for a light weight by constituting a piezoelectric element with a part of constitent parts of a fluid diode, and letting the pump itself have a check valve function. CONSTITUTION:A pump chamber 3 is made up of installing a piezoelectric element 2 on top of a fluid diode. A fluid 32 is made to flow a liquid tank 30 by way of a filler port via a liquid inducting pipe 31. When the piezoelectric element 2 vibrates as far as + or -S by means of impressing a voltage to an electrode part 4, the fluid heads for an outflow port 20 by dint of a resistance difference in the flowing. Thus, with the number of minimum part items, a small and light liquid feed pump without installing any check valve.</p> |