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发明名称
SEMICONDUCTOR EVALUATING DEVICE
摘要
申请公布号
JPH04192436(A)
申请公布日期
1992.07.10
申请号
JP19900324653
申请日期
1990.11.26
申请人
MATSUSHITA ELECTRON CORP
发明人
FUJITA YOSHIRO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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