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经营范围
发明名称
ELECTRON MICROSCOPE
摘要
申请公布号
JPH04192244(A)
申请公布日期
1992.07.10
申请号
JP19900320831
申请日期
1990.11.27
申请人
HITACHI LTD
发明人
KOBAYASHI HIROYUKI
分类号
H01J37/22;H01J37/04;H01J37/26
主分类号
H01J37/22
代理机构
代理人
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地址
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