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发明名称
OBSERVATION METHOD FOR MICRO CROSS SECTION
摘要
申请公布号
JPH04192247(A)
申请公布日期
1992.07.10
申请号
JP19900321834
申请日期
1990.11.26
申请人
SEIKO INSTR INC
发明人
IZAI HIROYASU;MINAFUJI TAKASHI
分类号
H01L21/66;H01J37/28;H01J37/30
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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