| 摘要 |
PURPOSE:To effectively cool an ultraviolet illumination sensor by cooling the ultraviolet monitor sensor of a semiconductor resist hardening, apparatus using the chemical action of ultraviolet rays with a water-cooling-type structure. CONSTITUTION:An illumination sensor 7 is fitted in and fixed to a sensor fixation hole 13, a main body 12 is tightened with a tightening bolt 15, and the illumination sensor 7 is tightened firmly, attached close, and fastened by transforming the slit 16 of the main body 12. When cooling water is poured into the cooler thus formed through a cooling water inlet 14a, the cooler body and the illumination sensor 7 in contact therewith are cooled. The cooling efficiency of that cooler using direct cooling by cooling water is by far higher than that of a cooler using air cooling. Thereby a clean illumination monitor high in cooling efficiency is obtained. |
