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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04192424(A)
申请公布日期
1992.07.10
申请号
JP19900324194
申请日期
1990.11.26
申请人
MITSUBISHI ELECTRIC CORP
发明人
IOKA SATOSHI
分类号
H01L23/52;H01L21/3205
主分类号
H01L23/52
代理机构
代理人
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