| 摘要 |
PURPOSE:To be of a vertical electric-field simulation type and to reduce the inductance of a discharge region, i.e., of a plasma part, by a method wherein the electrode inner circumferential part of a laminated capacitor constituted in the following manner is used as a discharge part: a plurality of electrode plates and insulating plates as superconductors are laminated alternately in such a way that circular, oval or rectangular holes made in the electrode plates and holes in the insulating plates are concentric. CONSTITUTION:Doughnut-shaped electrode plates 10 in which circular, oval or rectangular holes 11 have been made in the central axis function as a positive pole. Doughnut-shaped electrode plates 14 in which circular holes 15 have been made function as a negative pole. A plurality of electrode plates 15, insulating plates 12 and electrode plates 10 are laminated alternately so as to be concentric; the electrode plates 10, 14 are arranged at outermost sides (alternatively, the electrode plates 14 are arranged on both outermost sides); bolts 17A are inserted into through holes 17 made in ear-shaped knobs 16 and fastened by using nuts 17B; the plates are assembled. As a result, a plurality of capacitors which use the insulating plates 12 inserted between the electrode plates 10, 14 as a dielectric are laminated and constituted. Thereby, the inductance of a plasma part is reduced as a transverse excitation type, and the stray inductance of a circuit is reduced. |
