发明名称 SYSTEM FOR INTERCONNECTING A SEMICONDUCTOR DIE TO OTHER DEVICES
摘要 Wafer fabrication techniques are used to form an interconnect structure made of alternating insulating and conductive layers where the conductive layers are selectively connected by means of vias through the insulating layers. The interconnect structure is formed on top of a surface of a semiconductor die with circuits thereon. Electrical connections can be made to any part of the die surface, not just at the edges of the die surface.
申请公布号 WO9211743(A2) 申请公布日期 1992.07.09
申请号 WO1991US09543 申请日期 1991.12.18
申请人 VLSI TECHNOLOGY, INC. 发明人 LIANG, LOUIS, H.;LONG, JON, M.
分类号 H01L21/48;H01L23/495;H01L23/498;H01L23/538 主分类号 H01L21/48
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