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发明名称
TURBOMOLECULAR PUMP AND METHOD OF OPERATING THE SAME
摘要
申请公布号
EP0332107(B1)
申请公布日期
1992.07.08
申请号
EP19890103895
申请日期
1989.03.06
申请人
KABUSHIKI KAISHA TOSHIBA;EBARA CORPORATION
发明人
OKUMURA, KATSUYA;KURIYAMA, FUMIO;MURAI, YUKIO;TSUJIMURA, MANABU;SOBUKAWA, HIROSHI
分类号
F04B37/06;F04D19/04
主分类号
F04B37/06
代理机构
代理人
主权项
地址
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