ION BEAM PROCESSING DEVICE AND REPLACING METHOD FOR SAMPLE THEREOF

摘要

PURPOSE:To automatize a process of replacing a sample and improve production efficiency by providing a lifting means which lifts a sample holder up and down in replacing the sample. CONSTITUTION:A sample stage 10 in a circle shape on which a sample 5 is placed is provided with a sample holder 6. This sample stage 10 is connected with a motor 13 through gears 11, 12 so as to rotate in the direction of an arrow A in accordance with the drive of the motor 13. A catch rod 14 which is free to be lifted up and down in the direction of an arrow B is positioned around the outside of the sample stage 10. When the catch rod 14 is lifted up, the sample 5 is placed on the tip of the catch rod 14. Thus, sample replacement can be automatized and production efficiency can be improved.