发明名称 |
Diazo sensitizers of fluorinated esters. |
摘要 |
<p>A photosensitizer composition comprising a diazo fluorinated ester containing the hexafluoroisopropylidene group, said photosensitizer selected from hexafluoro-bis-phenols having the following formula: <CHEM> where R is selected from hydrogen, methyl, ethyl and phenyl; and bis-hexafluoroethers having the following formula: <CHEM> wherein R min is selected from hydrogen, methyl, ethyl and phenyl.</p> |
申请公布号 |
EP0493923(A1) |
申请公布日期 |
1992.07.08 |
申请号 |
EP19910311673 |
申请日期 |
1991.12.16 |
申请人 |
HOECHST CELANESE CORPORATION |
发明人 |
KHANNA, DINESH N.;POTVIN, ROBERT E. |
分类号 |
C08K3/16;C08L77/00;C08L77/06;G03F7/004;G03F7/016;G03F7/022;G03F7/027;G03F7/029;G03F7/037;G03F7/039;H01L21/027 |
主分类号 |
C08K3/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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