发明名称 Diazo sensitizers of fluorinated esters.
摘要 <p>A photosensitizer composition comprising a diazo fluorinated ester containing the hexafluoroisopropylidene group, said photosensitizer selected from hexafluoro-bis-phenols having the following formula: <CHEM> where R is selected from hydrogen, methyl, ethyl and phenyl; and bis-hexafluoroethers having the following formula: <CHEM> wherein R min is selected from hydrogen, methyl, ethyl and phenyl.</p>
申请公布号 EP0493923(A1) 申请公布日期 1992.07.08
申请号 EP19910311673 申请日期 1991.12.16
申请人 HOECHST CELANESE CORPORATION 发明人 KHANNA, DINESH N.;POTVIN, ROBERT E.
分类号 C08K3/16;C08L77/00;C08L77/06;G03F7/004;G03F7/016;G03F7/022;G03F7/027;G03F7/029;G03F7/037;G03F7/039;H01L21/027 主分类号 C08K3/16
代理机构 代理人
主权项
地址