| 摘要 |
PURPOSE:To make the structure compact, suppress the obstruction due to the peripheral environment and carrying out precision observation by installing an air conditioner, vibration preventing device, noise preventing device, magnetic field preventing device, and a lighting device inside and outside a precision environment room. CONSTITUTION:An air conditioner 22 for controlling the air stream and the temperature and humidity in a precision environment room 10, vibrationproof board 14 on which the precision equipment is placed, soundproof device for removing the noise in the room, magnetic field preventing device for reducing the magnetic field generated in the vicinity of the precision environment room 10, and a lighting device are arranged in the precision environment room 10 for installing the precision equipment such as electronic microscope 12. The vibration supplied from outside the environment room 10 is reduced by the vibrationproof board 14, and if noise is generated, the propagation of the noise is prevented by the wall of a vibrationproof structure. Further, if a magnetic field exists outside, the magnetic field is absorbed by the permalloy of the outer wall, and the air speed is adjusted by the air conditioner 22, and the vibration of the body of the electronic microscope 12 due to the disturbance of the air stream is prevented. |
