| 摘要 |
<p>PURPOSE:To position the moving base at a high speed with high precision by moving the moving base onto a fine moving stage from a rough moving stage after making the fine moving stage follow up the motion of the moving base on the rough moving stage. CONSTITUTION:The moving base 4 is mounted on the rough moving stage 2. Then the deviation of a moving base position signal 20a from the target position of the moving base 4 is monitored during the positioning operation of the moving base 4 by the stage 2 and when the deviation decreases below a set value, the moving base position signal 20a is regarded as the target position of the fine moving stage 3 to start positioning the stage 3. Then the signal 20a and a fine moving stage position signal 20b are monitored and when the stage 3 follows up the motion of the moving base 4, a stage 3 is moved in a Z-axial direction to move the moving stage 3. After the moving base 4 is moved, the moving base 4 is positioned by the stage 3 according to the deviation between the signal 20a and fine moving stage target position signal 22a. When the deviation decreases below the set value, the series of positioning operations of the moving base 4 end.</p> |
