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发明名称
OPTICAL HETERODYNE INTERFEROMETER
摘要
申请公布号
EP0467343(A3)
申请公布日期
1992.07.08
申请号
EP19910111969
申请日期
1991.07.17
申请人
CANON KABUSHIKI KAISHA
发明人
OHTSUKA, MASARU;HAYA, SATOSHI;NISHIMOTO, YOSHIFUMI
分类号
G01B9/02;G01B11/255;G01J9/02;G01J9/04;(IPC1-7):G01J9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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