SEMICONDUCTOR ACCELEROMETER

摘要

A semiconductor accelerometer includes a package containing damping liquid (101). A base (53) is fixedly disposed within the package. A semiconductor plate is disposed within the package and is supported on the base. The semiconductor plate has a movable free end (61) and a deformable diaphragm (64). A semiconductor strain gauge (85) is associated with the diaphragm (64) and deforms in accordance with deformation of the diaphragm (64). The base (53) has a first surface opposing the semiconductor plate free end. The first surface of the base has a recess for limiting movement of the semiconductor plate free end. The recess extends to and opens at a second surface of the base which differs from the first surface.