| 摘要 |
<p>PURPOSE:To obtain a large deposition area and realize a getter device which has such a capacity as a larger vacuum pump has by providing a bridging means which bridge a wire getter and a net deposition plate on the deposition face of a getter material of the bridged wire getter. CONSTITUTION:A bridging means 3 which bridges a wire getter 1 with a space above a fixed face 2 provided, and a net deposition plate 4 which is provided on the face of evaporation of a getter material in the bridged wire getter 1 are provided. When the wire getter 1 is heated with a current, the inside getter material evaporates in arrow directions and scattered. Then, the evaporated and gasified getter material reaches around the surface of the fixed face 2 due to a small blocking area of meshes 5, and it is deposited on a facing flat face 6 of the fixed face 2 as well as on mesh surfaces 7 so that a large deposition area can be obtained for the deposition on the mesh surfaces 7. Thus, such a capacity as that of a larger vacuum pump can be obtained.</p> |
