发明名称 Microscopic spectrometer.
摘要 <p>In order to confirm the position of a portion to be measured by spectrocopic measurement of a whole sample, in a microscopic spectrometer two optical paths (4a, 4b) are formed by a half mirror (12) detachably provided in the rear of an object lens (3). A second light source (13) for irradiating the sample (2) with beams through the mask is detachably provided in the rear of the mask and provides a focus of the object lens merely in one of said branched optical paths. A synthetic image of the whole image of the sample can be observed at the focus of the object lens (3) in the other branched optical path by coinciding the beams from the first light source (1 or 14) irradiating the whole sample with the beams and the image of the mask by beams from the second light source (13). &lt;IMAGE&gt;</p>
申请公布号 EP0493777(A2) 申请公布日期 1992.07.08
申请号 EP19910122120 申请日期 1991.12.23
申请人 HORIBA, LTD. 发明人 UKON, JUICHIRO;NAKATA, YASUSHI
分类号 G01N21/27;G01J3/02;G01J3/10 主分类号 G01N21/27
代理机构 代理人
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