| 发明名称 |
INTEGRATED CIRCUIT INTERCONNECTION |
| 摘要 |
An integrated circuit and method of fabrication are disclosed. The invention provides an etch-stop layer between a plug formed in a via and an overlying runner. The etch stop layer serves a variety of functions, including protecting the plug during the etching process which defines the runner. |
| 申请公布号 |
EP0448276(A3) |
申请公布日期 |
1992.07.08 |
| 申请号 |
EP19910302094 |
申请日期 |
1991.03.13 |
| 申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY |
发明人 |
MANOCHA, AJIT SINGH;RANA, VIRENDRA VIR SINGH |
| 分类号 |
H01L21/3213;H01L21/60;H01L21/768;H01L23/532;(IPC1-7):H01L21/60;H01L21/90 |
主分类号 |
H01L21/3213 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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