发明名称 On-chip variance detection for integrated circuit devices.
摘要 <p>A process variance detection technique for detecting fabrication processing variances in integrated circuit components, such as resistors or MOSFETs, is based on the decreased sensitivity to processing variations exhibited by components that are up-sized relative to similar components with nominal dimensions. Detection circuitry includes detection components with both nominal and up-sized dimensions, and variance detection involves detecting the differences in operational response of the nominal and up-sized detection components. For bipolar logic, resistors are fabricated with up-sized widths, while for MOS logic, MOSFETs are fabricated with up-sized gate lengths. <IMAGE></p>
申请公布号 EP0493828(A2) 申请公布日期 1992.07.08
申请号 EP19910122372 申请日期 1991.12.30
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 OVENS, KEVIN M.;BASS, ALAN S.;MAXEY, JAY A.
分类号 G01R31/26;H01L21/822;H01L23/544;H01L27/02;H01L27/04;H03K19/00 主分类号 G01R31/26
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