发明名称 BLACK RADIATOR FOR USE AS AN EMITTER IN CALIBRATABLE GAS SENSORS
摘要 The black radiator contains a doped, crystalline silicon member having a honeycombed surface and contains a controllable electrical heating mechanism with which the silicon member can be heated. The heating mechanism has a heating coil that is a doped silicon structure that is oppositely doped to the doping of the silicon member and to which a controllable voltage is applied. The manufacturing method provides that the silicon member having a honeycombed surface be manufactured from an n-silicon member by electrolytic etching.
申请公布号 US5128514(A) 申请公布日期 1992.07.07
申请号 US19880212799 申请日期 1988.06.29
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 LEHMANN, VOLKER;FOELL, HELMUT
分类号 G01J3/10;G01J5/52;G01N21/01;G01N21/35;H05B3/20;H05B3/26 主分类号 G01J3/10
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