发明名称 |
BLACK RADIATOR FOR USE AS AN EMITTER IN CALIBRATABLE GAS SENSORS |
摘要 |
The black radiator contains a doped, crystalline silicon member having a honeycombed surface and contains a controllable electrical heating mechanism with which the silicon member can be heated. The heating mechanism has a heating coil that is a doped silicon structure that is oppositely doped to the doping of the silicon member and to which a controllable voltage is applied. The manufacturing method provides that the silicon member having a honeycombed surface be manufactured from an n-silicon member by electrolytic etching.
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申请公布号 |
US5128514(A) |
申请公布日期 |
1992.07.07 |
申请号 |
US19880212799 |
申请日期 |
1988.06.29 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
LEHMANN, VOLKER;FOELL, HELMUT |
分类号 |
G01J3/10;G01J5/52;G01N21/01;G01N21/35;H05B3/20;H05B3/26 |
主分类号 |
G01J3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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