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经营范围
发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH04188820(A)
申请公布日期
1992.07.07
申请号
JP19900318887
申请日期
1990.11.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
OKAMOTO YOSHIHIKO
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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