发明名称 |
METHOD FOR PRODUCING UNIFORM POLYMETHYLMETHACRYLATE LAYERS |
摘要 |
A method for producing smooth uniform polymethylmethacrylate (PMMA) layers having a thickness of greater than 20 mu m. The PMMA layers are produced utilizing a solution of polymethylmethacrylate in an ester of lactic acid. The PMMA layers are particularly suited for micro-structuring techniques which utilize high-energy, ionizing radiation. The PMMA layers exhibit a good adhesion to metallic, semi-conducting and insulating substrates.
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申请公布号 |
US5128207(A) |
申请公布日期 |
1992.07.07 |
申请号 |
US19890446792 |
申请日期 |
1989.12.06 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
FORMANEK, HELMUT;HINTERMAIER, MAGDALENA;KNAPEK, ERWIN;LISCHKE, BURKHARD |
分类号 |
B05D3/06;B05D7/24;C08J3/09;C09D133/12;G03F7/004;G03F7/039 |
主分类号 |
B05D3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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