发明名称 METHOD FOR PRODUCING UNIFORM POLYMETHYLMETHACRYLATE LAYERS
摘要 A method for producing smooth uniform polymethylmethacrylate (PMMA) layers having a thickness of greater than 20 mu m. The PMMA layers are produced utilizing a solution of polymethylmethacrylate in an ester of lactic acid. The PMMA layers are particularly suited for micro-structuring techniques which utilize high-energy, ionizing radiation. The PMMA layers exhibit a good adhesion to metallic, semi-conducting and insulating substrates.
申请公布号 US5128207(A) 申请公布日期 1992.07.07
申请号 US19890446792 申请日期 1989.12.06
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 FORMANEK, HELMUT;HINTERMAIER, MAGDALENA;KNAPEK, ERWIN;LISCHKE, BURKHARD
分类号 B05D3/06;B05D7/24;C08J3/09;C09D133/12;G03F7/004;G03F7/039 主分类号 B05D3/06
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