| 摘要 |
PURPOSE:To adjust the position of a mask without assistance by requiring an amount of deviation of a mask from a hole position to a laser beam axis and moving the mask through a mask position adjusting mechanism to correct this. CONSTITUTION:In a laser beam machine, alignment of a work W is performed as the central position of prescribed two slots is agreed with the central position of two holes corresponding to two slots of holes made on the work W previously. The central position of this hole and the central position of the slot are obtained by processing image signals of the holes and slots observed by ITVs 71, 81 of the measurement optics systems 70, 80 through the image processing systems 208,209. The central position of the hole obtained is stored in a storage means RAM 202 as a reference value through a control system 200. Further, in the control system 200, the central position of the slot obtained by the image processing systems 208, 209 is compared with the reference value to calculate the amount of deviation of the work W, the calculated amount of deviation is transmitted to the controller 206 of the mobile system as an amount of travel and a mobile stage 120 is driven to agree the center of the hole of the work W with the center of the slot. |
