| 摘要 |
<p>PURPOSE:To increase the electrostatic attraction and elevate the resistance to ions by using the material such as a sintered body, glass, chemical vapor phase laminate, etc., for the insulator and fixing it with an adhesive, in the electrostatic chuck, which attracts an article through the insulator. CONSTITUTION:An electrostatic chuck has a chuck body 30, a soft electrostatic attraction sheet 40, arranged at the surface, and a sheet 50 for supplying power to this electrostatic attraction sheet 40. The electrostatic attraction sheet 40 has a conductive sheet 20 consisting of copper or the like as the conductive layer, and an insulating layer polyimide sheet 18 is provided at the rear side of this conductive sheet 20, that is, between it and the chuck body 30, and at the surface side of the conductive sheet 20, an insulating aluminum nitride sheet 22 is bonded with thermosetting resin 60.</p> |
