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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04186726(A)
申请公布日期
1992.07.03
申请号
JP19900315333
申请日期
1990.11.20
申请人
NEC CORP
发明人
ITO NOBUKAZU
分类号
C23C14/34;H01L21/28;H01L21/285
主分类号
C23C14/34
代理机构
代理人
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地址
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