MANUFACTURE OF THIN FILM TRANSISTOR,申请号JP19900311732-传众专利搜索

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发明名称	MANUFACTURE OF THIN FILM TRANSISTOR
摘要
申请公布号	JPH04186633(A)	申请公布日期	1992.07.03
申请号	JP19900311732	申请日期	1990.11.16
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	FURUTA MAMORU;KAWAMURA TETSUYA;YOSHIOKA TATSUO;TSUTSU HIROSHI;MIYATA YUTAKA
分类号	H01L21/22;H01L21/20;H01L21/265;H01L21/336;H01L29/78;H01L29/786	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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