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发明名称
SEMICONDUCTOR SUBSTRATE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH04186824(A)
申请公布日期
1992.07.03
申请号
JP19900314432
申请日期
1990.11.21
申请人
FUJITSU LTD
发明人
KITAHARA KUNINORI;OTSUKA NOBUYUKI
分类号
H01L29/20;H01L21/02;H01L21/205
主分类号
H01L29/20
代理机构
代理人
主权项
地址
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